샘플 크리닝, 표면 처리
Specification
Model
PDC610G
plasma mode
RIE / DP
electrode structure
3 stage independent parallel
flat plates
high frequency output
max 600W
outgoing frequency
13.56 MHz
control and display system
sequencer and touch panel
External dimension
W600× D722× H700 mm
reactive gas
2 systems (argon and oxygen)
purge gas
Nitrogen or dry air
;)
