반도체 wafer의 박막 두께, 특성 측정 및 OCD Profile을 확장된 파장대에서 제공 (UV-Vis-IR : 190~15000nm)
The n&k Olympian, n&k Olympian-450 and n&k Olympian-M are DUV-Vis-IR scatterometers/thin film metrology systems with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series. The systems in the Olympian-Series are capable of determining thickness, n and k spectra from 190nm – 15,000nm of thin and thick films, as well as depths, CDs, and profiles of trenches and contact holes.
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