타의 추종을 불허하는 뛰어난 성능의 collimation과 균일한 노광을 제공하는 UV LED 마스크얼라이너로 컴팩트한 크기에 최대 6inch의 기판을 정렬(alignment)하고 노광(exposure) 할 수 있는 유일한 시스템입니다.

주요특징
 • UV LED soft lithography system (High quality collimation system)
 • Fully operated by a touch-screen
 • The realization of microstructures below 1um over the entire 4” or 6” work surface with an alignment precision of less than 1um
 • Long lifetime : >10000 hours

Performances
 • Resolution: 1µm
 • Alignment accuracy: 1µm
 • Accepted masks size: up to Ø 5" or Ø 7" respectively with 4'''''''' and 6'''''''' version
 • Accepted substrate size: Ø 2" - Ø 4" - Ø 6" and 50 x 50mm - 100 x 100mm
 • Visualization system resolution: 1,5µm
 • Mask/substrate measuring distance resolution: 0,5µm
 • θ substrate displacement resolution: 5.10-4°
 • XYZ substrate displacement resolution: 0,4µm
 • Wavelength: 365nm +/- 5nm
 • Power density: 35mW/cm² +/- 10%
 • Substrate warm-up during exposure: < 1°C
 • Exposure cycle: between 1s and 1h
 • Number of programmable cycles: > 100

Specifications
 • Dimensions: 475 x 480 x 515mm
 • Weight: 55kg / 121lbs
 • Displacement control: USB 24 key PAD
 • Colour touchscreen: 15.6 inches
 • Power supply: 100V/240V - 50Hz/60Hz
 • Consumption: 180W