샘플 크리닝, 표면 처리
Specification
Model
V1000
V1000X
V1000XS
Plasma Mode
RIE and DP
Electrode struecture
Parallel flat stage plate
Stage size
280mmW x 280mmD
300mmW x 300mmD
(double stage)
400mmW x 375mmD
Chamber size
400mm W x 400mm D
x 380mm H
600mm W x 554mm D
x 440mm H
Vacuum gauge
Capacitance manometer
Reaction gas system
Two system
Controller
Programmable controller
;)
